Doping Incorporation in InAs nanowires characterized by capacitance measurements

Sn and Se doped InAs nanowires are characterized using a capacitance-voltage technique where the threshold voltages of nanowire capacitors with different diameter are determined and analyzed using an improved radial metal-insulator-semiconductor field-effect transistor model. This allows for a separation of doping in the core of the nanowire from the surface charge at the side facets of the nanowire. The data show that the doping level in the InAs nanowire can be controlled on the level between 2 1018 to 1 1019 cm−3, while the surface charge density exceeds 5 1012 cm−2 and is shown to increase with higher dopant precursor molar fraction. © 2010 American Institute of Physics. doi:10.1063/1.3475356